Works matching DE "MAGNETRON sputtering"


Results: 4
    1

    TC-SAW SiO<sub>2</sub> 温补层性能研究.

    Published in:
    Piezoelectrics & Acoustooptics, 2025, v. 47, n. 1, p. 88, doi. 10.11977/j.issn.1004-2474.2025.01.014
    By:
    • 贺 贞;
    • 李 燕;
    • 田本朗;
    • 马晋毅;
    • 肖 强;
    • 梁柳洪
    Publication type:
    Article
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