Works matching AU Bao, Xin


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    Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012).

    Published in:
    Advanced Materials, 2012, v. 24, n. 23, p. 3082, doi. 10.1002/adma.201290134
    By:
    • Yi, He;
    • Bao, Xin-Yu;
    • Zhang, Jie;
    • Bencher, Christopher;
    • Chang, Li-Wen;
    • Chen, Xiangyu;
    • Tiberio, Richard;
    • Conway, James;
    • Dai, Huixiong;
    • Chen, Yongmei;
    • Mitra, Subhasish;
    • Wong, H.-S. Philip
    Publication type:
    Article
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