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Title

TEMPERATURE-DEPENDENT MODIFICATIONS OF Ag/SiO<sub>2</sub>/p-Si SCHOTTKY CONTACTS FORMED AT 20 K.

Authors

ALI, A.; YASAR, M.; NASIM, F.; BHATTI, A. S.

Abstract

The Schottky contacts of Ag/SiO2/p-Si were fabricated by thermal evaporation at 20 K. The effect of annealing temperatures varying from 373 to 773 K on the morphology and electrical properties of these contacts was investigated. The average grain size increased while the density of grains decreased with increasing temperature. Ideality factor initially observed was as high as 4.15 with a low barrier height of 0.04 eV for contact grown at 20 K. Annealing resulted in shift of ideality factor and barrier height towards ideal behavior. Thus, it is demonstrated that Ag/SiO2/p-Si contacts grown at low temperature can be modified by annealing.

Subjects

ELECTRIC contacts; TEMPERATURE effect; SILICA; SILVER; MICROFABRICATION; THERMAL analysis; EVAPORATION (Chemistry); ANNEALING of crystals

Publication

International Journal of Nanoscience, 2010, Vol 9, Issue 3, p135

ISSN

0219-581X

Publication type

Academic Journal

DOI

10.1142/S0219581X10006740

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