Title: APPLICATION OF SUPERCRITICAL FLUIDS FOR FABRICATION OF FREE-STANDING NANOOBJECTS.
Authors: Chehovskiy, A. V.; Prinz, V. Ya.
Abstract: It is experimentally shown that, unlike evaporation drying, supercritical CO2 drying makes it possible to obtain free-standing single-coil InGaAs/GaAs nanotubes and other nanoshells with wall thicknesses down to 1 nm without their deformation by capillary forces. The performed process optimization has allowed us to reduce tenfold the duration of the process for long nanotubes. For the first time, etching of sacrificial AlAs layers in supercritical media was performed.
Subjects: SUPERCRITICAL fluids; DRYING; EVAPORATION (Chemistry); NANOTUBES; ETCHING; FLUID mechanics
Publication: International Journal of Nanoscience, 2004, Vol 3, Issue 1/2, p1
ISSN: 0219-581X
Publication type: Academic Journal
DOI: 10.1142/S0219581X04001444

APPLICATION OF SUPERCRITICAL FLUIDS FOR FABRICATION OF FREE-STANDING NANOOBJECTS.

Chehovskiy, A. V.; Prinz, V. Ya.