Title: Evaluating intrinsic deformations in oxygen-containing precipitates.
Authors: Goldstein, R. V.; Ustinov, K. B.; Shushpannikov, P. S.; Mezhennyi, M. V.; Mil'vidskiĭ, M. G.; Reznik, V. Ya.
Abstract: A new method is proposed for evaluation of the intrinsic deformations of precipitates in silicon based on an analysis of the precipitate-dislocation arrays that appear at the late stages of multistep thermal treatment of silicon wafers. The estimate can be used for determining the fraction of a matrix substance present in the precipitate.
Subjects: DEFORMATIONS (Mechanics); OXYGEN; SILICON; NONMETALS; PHYSICS
Publication: Technical Physics Letters, 2008, Vol 34, Issue 2, p106
ISSN: 1063-7850
Publication type: Academic Journal
DOI: 10.1134/S1063785008020065

Evaluating intrinsic deformations in oxygen-containing precipitates.

Goldstein, R. V.; Ustinov, K. B.; Shushpannikov, P. S.; Mezhennyi, M. V.; Mil'vidskiĭ, M. G.; Reznik, V. Ya.