Works matching IS 10637826 AND DT 2006 AND VI 40 AND IP 11


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    Infrared spectroscopy of bonded silicon wafers.

    Published in:
    Semiconductors, 2006, v. 40, n. 11, p. 1304, doi. 10.1134/S1063782606110108
    By:
    • Milekhin, A. G.;
    • Himcinschi, C.;
    • Friedrich, M.;
    • Hiller, K.;
    • Wiemer, M.;
    • Gessner, T.;
    • Schulze, S.;
    • Zahn, D. R.
    Publication type:
    Article
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