Works matching DE "RADIOFREQUENCY sputtering"


Results: 510
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    Effect of RF magnetron sputtering parameters on the optimization of the discharge capacity of ternary lithium oxide thin films.

    Published in:
    Journal of Materials Science: Materials in Electronics, 2021, v. 32, n. 13, p. 17462, doi. 10.1007/s10854-021-06278-7
    By:
    • Lopez, Daniel Andres Sanchez;
    • Chagas, Luciana Gomes;
    • Batista, Aline Domingues;
    • Guaita, Maria Gabriella Detone;
    • Amorin, Luís Henrique Cardozo;
    • da Silva, Paulo Rogério Catarini;
    • Yamanishi, Gustavo;
    • Zaia, Dimas Augusto Morozin;
    • de Santana, Henrique;
    • Urbano, Alexandre
    Publication type:
    Article
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