Title: A survey of dispatching rules for operational control in wafer fabrication.
Authors: Sarin, Subhash C.; Varadarajan, Amrusha; Wang, Lixin
Abstract: Production scheduling in semiconductor wafer fabs is a non-trivial task owing to the complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop floor control in this industry. Over the years, advanced dispatching rules, capable of impacting multiple performance measures and utilising both upstream and downstream information in assigning lot priorities, have been introduced. This article aims to provide an overview of these rules and explores the effectiveness of their performance as they pertain to different areas in a wafer fab. Based on this overview, several future directions on developing new dispatching rules are also proposed.
Subjects: SEMICONDUCTOR wafers; PRODUCTION scheduling; PHOTOLITHOGRAPHY; BATCH processing; AUTOMATED materials handling; SEMICONDUCTOR manufacturing; INDUSTRIAL efficiency
Publication: Production Planning & Control, 2011, Vol 22, Issue 1, p4
ISSN: 0953-7287
Publication type: Academic Journal
DOI: 10.1080/09537287.2010.490014

A survey of dispatching rules for operational control in wafer fabrication.

Sarin, Subhash C.; Varadarajan, Amrusha; Wang, Lixin