Attempting to model the processes resulting in complex pattern formation and small-scale roughness of surfaces and to compare with experimental measurements calls for numerical methods which allow a quantitative characterization being as complete as possible. New methods incorporating wavelets and stochastic approaches based on the theory of Markov processes allow a stepwise characterization of increasing completeness and unambiguousness. In this paper we demonstrate the underlying numerical approaches taking electropolished and laser-jet etched surfaces for demonstration.