Cesium phosphates with different Cs/P molar ratios were prepared by a solution evaporation method. X-ray powder diffraction, thermogravimetric, and differential thermal analyses were performed in order to reveal the chemical transformation and phase compositions which take place during the heating of the mixtures CsCO/(NH)HPO and CsNO/(NH)HPO as well as individual compound. The effects of the Cs/P molar ratio, Cs source and treatment temperature on thermal behavior of the cesium phosphates were investigated. The results showed that different reactions take place with molar ratio from 1/2 to 3/1. Meanwhile, the thermostability of CsCO and CsNO intimately affects the phase composition and phase transition during heating process. However, for all the Cs-P oxides samples, the crystallinity was decreased differently after higher temperature treatment.