To increase the accuracy of the analysis of silicon and rock samples by the inductively coupled plasma mass spectrometry, it is proposed to use both highly-enriched stable and short-lived radioactive isotopes with high specific radioactivity obtained in nuclear reactor to control the yield of elements on decomposition. Autoclave decomposition method for silicon and rock samples is proposed. Non-purified silicon sample irradiated in a nuclear reactor was used for testing of element recoveries during sample decomposition. Analysis of granite and black shale reference rock samples has been done using the suggested approach.