Stealth dicing of sapphire wafers with near infra-red femtosecond pulses.Published in:Applied Physics A: Materials Science & Processing, 2017, v. 123, n. 5, p. 1, doi. 10.1007/s00339-017-0927-0By:Yadav, Amit;Kbashi, Hani;Kolpakov, Stanislav;Gordon, Neil;Zhou, Kaiming;Rafailov, EdikPublication type:Article