Title: Temperature dependence of the optical properties of ion-beam sputtered ZrN films.
Authors: Larijani, M.; Kiani, M.; Jafari-Khamse, E.; Fathollahi, V.
Abstract: The reflectivity of sputtered Zirconium nitride films on glass substrate has been investigated in the spectral energy range of 0.8-6.1 eV as a function of deposition temperature varying between 373 and 723 K. Optical constants of the prepared films have been determined using the Drude analysis. Experimental results showed strong dependency of optical properties of the films, such as optical resistivity on the substrate temperature. The temperature increase of the substrate has shown an increase in both the plasmon frequency and electron scattering time. The electrical behavior of the films showed a good agreement between their optical and electrical resistivity.
Subjects: ZIRCONIUM compounds; EFFECT of temperature on metals; OPTICAL properties of metals; ION beams; SPUTTERING (Physics)
Publication: Applied Physics A: Materials Science & Processing, 2014, Vol 117, Issue 3, p1179
ISSN: 0947-8396
Publication type: Academic Journal
DOI: 10.1007/s00339-014-8495-z

Temperature dependence of the optical properties of ion-beam sputtered ZrN films.

Larijani, M.; Kiani, M.; Jafari-Khamse, E.; Fathollahi, V.