The dynamic analysis of the gas lubricated stage in optical lithography.

Xueming He; Xuedong Chen

To identify the model and study the possibility of chaotic motion of the gas lubricated stage, the dynamical behavior of the stage with gas-lubricated bearings in optical lithography is studied theoretically and experimentally. A model of the bearing is established by a single mode approximation using the Navier-stokes equation and the Newton equation. The setup of the stage is dragged by a linear motor, and its positions in three directions are detected by three laser interferometers. Analysis of the dynamics of the stage is carried out too. The results show that the amplitude frequency response of the stage is largely affected by the nonlinear air bearings, and the positioning accuracy is affected by the gap of the air bearings, as well as the control method. So the suitable gap of the air bearing should be taken into account when designing and manufacturing the ultra precision positioning stage.

CHAOS theory; GAS flow; FLUID dynamics; LITHOGRAPHY; BEARINGS (Machinery); NEWTON-Raphson method

International Journal of Advanced Manufacturing Technology, 2007, Vol 32, Issue 9/10, p978

0268-3768

Academic Journal

10.1007/s00170-006-0416-7