Works matching Microlithography
Results: 146
Topology optimization for optical microlithography with partially coherent illumination.
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- International Journal for Numerical Methods in Engineering, 2017, v. 109, n. 5, p. 631, doi. 10.1002/nme.5299
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- Article
Micrographic Digital Image Correlation Coupled with Microlithography: Case Study of Strain Localization and Subsequent Cracking at an FIB Notch Tip in a Laminated Ti-6Al-4V Alloy.
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- Experimental Mechanics, 2018, v. 58, n. 2, p. 381, doi. 10.1007/s11340-017-0336-5
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- Article
Fabrication of oriented crystals as force measurement tips via focused ion beam and microlithography methods.
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- Surface & Interface Analysis: SIA, 2018, v. 50, n. 1, p. 117, doi. 10.1002/sia.6346
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- Article
THERMAL ANALYSIS OF A SILICON WAFER PROCESSING COMBINATION BAKE-CHILL STATION USED IN MICROLITHOGRAPHY.
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- Materials & Manufacturing Processes, 2005, v. 20, n. 2, p. 273, doi. 10.1081/AMP-200042048
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Artificial colloidal liquid metacrystals by shearing microlithography.
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- Nature Communications, 2019, v. 10, n. 1, p. N.PAG, doi. 10.1038/s41467-019-11941-z
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- Article
An alternative approach for microlithography light source.
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- Applied Physics B: Lasers & Optics, 2005, v. 80, n. 4/5, p. 577, doi. 10.1007/s00340-005-1768-7
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- Article
3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder.
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- Micromachines, 2020, v. 11, n. 2, p. 157, doi. 10.3390/mi11020157
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Optical Microlithography of Perovskite Quantum Dots/Organic Semiconductor Heterojunctions for Neuromorphic Photosensors.
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- Advanced Functional Materials, 2024, v. 34, n. 23, p. 1, doi. 10.1002/adfm.202315175
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- Article
Evolution in Lithography Techniques: Microlithography to Nanolithography.
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- Nanomaterials (2079-4991), 2022, v. 12, n. 16, p. 2754, doi. 10.3390/nano12162754
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- Article
Lithographic Performance of Aryl Epoxy Thermoset Resins as Negative Tone Photoresist for Microlithography.
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- Polymers (20734360), 2020, v. 12, n. 10, p. 2359, doi. 10.3390/polym12102359
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- Article
Investigation of Strain Heterogeneities Between Grains in Ferritic and Ferritic-Martensitic Steels.
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- Experimental Mechanics, 2013, v. 53, n. 3, p. 427, doi. 10.1007/s11340-012-9657-6
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- Article
Analog Spatial Light Modulators Based on Micromirror Arrays.
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- Micromachines, 2021, v. 12, n. 5, p. 483, doi. 10.3390/mi12050483
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- Article
STUDY OF THE THERMAL DEPROTECTION IN A CHEMICALLY-AMPLIFIED RESIST.
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- International Journal of Nanoscience, 2004, v. 3, n. 6, p. 775, doi. 10.1142/S0219581X04002632
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Industry's problems, solutions exposed at lithography's annual showcase.
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- Solid State Technology, 2001, v. 44, n. 5, p. 33
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- Article
50nm gates via optical lithography, OPC advances.
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- Solid State Technology, 2000, v. 43, n. 4, p. 26
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Birefringence in fused silica and CaF... for lithography.
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- Solid State Technology, 2000, v. 43, n. 2, p. 77
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Interface '98 focuses on realistic lithography.
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- Solid State Technology, 1999, v. 42, n. 1, p. 28
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ARO coating passes 1 billion pulse mark at MIT.
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- Solid State Technology, 1998, v. 41, n. 10, p. 44
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193-nm development hampered by contamination.
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- Solid State Technology, 1998, v. 41, n. 5, p. 32
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A Novel Approach to Align Adult Neural Stem Cells on Micropatterned Conduits for Peripheral Nerve Regeneration: A Feasibility Study.
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- Artificial Organs, 2009, v. 33, n. 1, p. 26, doi. 10.1111/j.1525-1594.2008.00671.x
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- Article
High-efficiency clean EUV plasma source at 10–30 nm, driven by a long-pulse-width excimer laser.
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- Applied Physics B: Lasers & Optics, 2003, v. 76, n. 3, p. 277, doi. 10.1007/s00340-002-1088-0
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- Article
Far-field Diffraction Properties of Annular Walsh Filters.
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- Advances in Optical Technologies, 2013, p. 1, doi. 10.1155/2013/360450
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- Article
FABRICATION OF TRUE-COLOR MICROPATTERNS BY 2D STEPWISE CONTRACTION AND ADSORPTION NANOLITHOGRAPHY (SCAN).
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- Surface Review & Letters, 2007, v. 14, n. 1, p. 129, doi. 10.1142/S0218625X07009141
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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Book Review).
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- 1999
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- Book Review
Microlithography (Book Review).
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- 1999
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- Book Review
CUTTING DIFFRACTION GRATINGS TO IMPROVE DISPERSION ("FIRE") IN DIAMONDS.
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- Gems & Gemology, 2009, v. 45, n. 4, p. 260, doi. 10.5741/GEMS.45.4.260
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- Article
Microchip for the Measurement of Seebeck Coefficients of Single Nanowires.
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- Journal of Electronic Materials, 2009, v. 38, n. 7, p. 1109, doi. 10.1007/s11664-009-0714-6
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- Article
Deep learning–based inverse method for layout design.
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- Structural & Multidisciplinary Optimization, 2019, v. 60, n. 2, p. 527, doi. 10.1007/s00158-019-02222-w
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- Article
Deformation of Aluminum Investigated by Digital Image Correlation: Evidence of Simultaneous Crystal Slip and Grain Boundary Sliding.
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- Metallurgical & Materials Transactions. Part A, 2024, v. 55, n. 6, p. 1814, doi. 10.1007/s11661-024-07349-0
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Elimination, reversal and directional bias of optical diffraction.
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- Nature Physics, 2009, v. 5, n. 9, p. 665, doi. 10.1038/nphys1358
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QUANTUM PHENOMENA VISUALIZED BY ELECTRON WAVES.
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- International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, 2007, v. 21, n. 32, p. 5291, doi. 10.1142/S021797920703837X
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- Article
Cytophobic Surface Modification of Microfluidic Arrays for In Situ Parallel Peptide Synthesis and Cell Adhesion Assays.
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- Biotechnology Progress, 2007, v. 23, n. 4, p. 972, doi. 10.1002/bp070070a
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- Article
High efficiency transmission grating for the ESO CUBES UV spectrograph.
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- Experimental Astronomy, 2023, v. 55, n. 1, p. 281, doi. 10.1007/s10686-022-09840-1
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Bis zu mehreren Millionen Spiegeln auf einem Halbleiterchip.
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- Elektronik Industrie, 2023, p. 75
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- Article
New aspects of micromachining and microlithography using 157-nm excimer laser radiation.
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- Applied Physics A: Materials Science & Processing, 1999, v. 69, n. 7, p. S305, doi. 10.1007/s003390051405
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- Article
Miniaturization effect of electroosmotic self-propulsive microswimmer powered by biofuel cell.
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- ROBOMECH Journal, 2019, v. 6, n. 1, p. 1, doi. 10.1186/s40648-019-0146-x
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- Article
Generating broadband random Gaussian signals.
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- Technical Physics Letters, 2010, v. 36, n. 8, p. 733, doi. 10.1134/S106378501008016X
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- Article
Design of an ultraviolet projection lens by using a global search algorithm and computer optimization.
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- Advanced Optical Technologies, 2017, v. 6, n. 1, p. 31, doi. 10.1515/aot-2016-0058
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Next-generation litho is the focus of Belgium conference.
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- Solid State Technology, 1999, v. 42, n. 1, p. 20
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Tech briefs.
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- Solid State Technology, 1998, v. 41, n. 5, p. 32
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- Article
In Situ Microlithography of Si and GaAs by a Focused Ion Beam in a 200 keV TEM.
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- Journal of Electron Microscopy, 1996, v. 45, n. 4, p. 291, doi. 10.1093/oxfordjournals.jmicro.a023445
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- Article
Resist-assisted atom lithography with group III elements.
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- Applied Physics B: Lasers & Optics, 2006, v. 85, n. 4, p. 487, doi. 10.1007/s00340-006-2481-x
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- Article
Femtosecond decay-time measurement of electron-plasma oscillation in nanolithographically designed silver particles.
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- Applied Physics B: Lasers & Optics, 1997, v. 64, n. 2, p. 269, doi. 10.1007/s003400050174
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- Article
Research on Maskless Lithography System Based on Digital Oblique Scanning Strategy.
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- Journal of Laser Micro / Nanoengineering, 2020, v. 15, n. 1, p. 1, doi. 10.2961/jlmn.2020.01.2008
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- Article
Poly(ethylene terephthalate) crystallization as a method for microlithography.
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- Polymer Engineering & Science, 1990, v. 30, n. 18, p. 1165, doi. 10.1002/pen.760301809
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- Article
Novel Design of Carbon-Rich Polymers for 193 nm Microlithography: Adamantane-Containing Cyclopolymers.
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- Advanced Materials, 2000, v. 12, n. 5, p. 347, doi. 10.1002/(SICI)1521-4095(200003)12:5<347::AID-ADMA347>3.0.CO;2-D
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Introduction to microlithography (2nd edition). Edited by L. F. Thompson, C. G. Willson and M. J. Bowden. American Chemical Society, Washington, D.C., 1994. pp. xiv + 527, price US$59.95. ISBN 0-8412-2848-5.
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- Polymer International, 1995, v. 37, n. 3, p. 231, doi. 10.1002/pi.1995.210370312
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- Article
EPIAURIGNACIAN IN DUSTRY WITH SAGAIDAK-MURALOVKA-TYPE MICROLITHS INDUSTRY IN THE SOUTH OF EASTERN EUROPE AND EASTERN CENTRAL EUROPE AND ITS LITHIC ARTEFACT FOSSIL TYPES.
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- Študijné Zvesti AU SAV, 2023, p. 93, doi. 10.31577/szausav.2021.suppl.2.7
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- Article
Facile Microfluidic Fabrication of 3D Hydrogel SERS Substrate with High Reusability and Reproducibility via Programmable Maskless Flow Microlithography.
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- Advanced Optical Materials, 2020, v. 8, n. 23, p. 1, doi. 10.1002/adom.202001586
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Holographic microlithography.
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- Optical Engineering, 1995, v. 34, n. 9, p. 2724, doi. 10.1117/12.205673
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