Effects of bias voltage on structure and properties of TiAl-doped a-C:H films prepared by magnetron sputtering. | EBSCOhost

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Title: Effects of bias voltage on structure and properties of TiAl-doped a-C:H films prepared by magnetron sputtering.
Authors: Pang, Xianjuan; Hao, Junying; Wang, Peng; Xia, Yanqiu; Liu, Weimin
Publication: Surface & Interface Analysis: SIA, 2011, Vol 43, Issue 3, p677
ISSN: 0142-2421
Publication type: Academic Journal
DOI: 10.1002/sia.3501