We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Addressing multicollinearity in semiconductor manufacturing.
- Authors
Chang, Yu-Ching; Mastrangelo, Christina
- Abstract
When building prediction models in the semiconductor environment, many variables, such as input/output variables, have causal relationships which may lead to multicollinearity. There are several approaches to address multicollinearity: variable elimination, orthogonal transformation, and adoption of biased estimates. This paper reviews these methods with respect to an application that has a structure more complex than simple pairwise correlations. We also present two algorithmic variable elimination approaches and compare their performance with that of the existing principal component regression and ridge regression approaches in terms of residual mean square and R2. Copyright © 2011 John Wiley & Sons, Ltd.
- Subjects
MANUFACTURING processes; SEMICONDUCTORS; REGRESSION analysis; MULTICOLLINEARITY; ESTIMATION theory
- Publication
Quality & Reliability Engineering International, 2011, Vol 27, Issue 6, p843
- ISSN
0748-8017
- Publication type
Academic Journal
- DOI
10.1002/qre.1173