Works matching IS 14381656 AND DT 2009 AND VI 11 AND IP 4


Results: 18
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    New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM.

    Published in:
    Advanced Engineering Materials, 2009, v. 11, n. 4, p. 241, doi. 10.1002/adem.200800298
    By:
    • Kuesters, Karl Heinz;
    • Beug, Marc Florian;
    • Schroeder, Uwe;
    • Nagel, Nicolas;
    • Bewersdorff, Ulrike;
    • Dallmann, Gerald;
    • Jakschik, Stefan;
    • Knoefler, Roman;
    • Kudelka, Stephan;
    • Ludwig, Christoph;
    • Manger, Dirk;
    • Mueller, Wolfgang;
    • Tilke, Armin
    Publication type:
    Article
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    In-Situ Studies of ALD Growth of Hafnium Oxide Films.

    Published in:
    Advanced Engineering Materials, 2009, v. 11, n. 4, p. 265, doi. 10.1002/adem.200800348
    By:
    • Karavaev, Konstantin;
    • Kolanek, Krzysztof;
    • Tallarida, Massimo;
    • Schmeißer, Dieter;
    • Zschech, Ehrenfried
    Publication type:
    Article
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    Editorial.

    Published in:
    Advanced Engineering Materials, 2009, v. 11, n. 4, p. 215, doi. 10.1002/adem.200900004
    Publication type:
    Article
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