Works matching AU Wimplinger, Markus

A full-process chain assessment for nanoimprint technology on 200-mm industrial platform.

Published in:

Advanced Optical Technologies, 2017, v. 6, n. 3/4, p. 277, doi. 10.1515/aot-2017-0018

By:

• Teyssedre, Hubert;
• Landis, Stefan;
• Thanner, Christine;
• Laure, Maria;
• Khan, Jonas;
• Bos, Sandra;
• Eibelhuber, Martin;
• Chouiki, Mustapha;
• May, Michael;
• Brianceau, Pierre;
• Pollet, Olivier;
• Hazart, Jerome;
• Laviron, Cyrille;
• Pain, Laurent;
• Wimplinger, Markus

Publication type:

Article