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Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching.
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- Micromachines, 2021, v. 12, n. 5, p. 501, doi. 10.3390/mi12050501
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- Article
Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography.
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- Nanomaterials (2079-4991), 2021, v. 11, n. 9, p. 2329, doi. 10.3390/nano11092329
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- Article
Plasmonic electro-optic modulators on lead zirconate titanate platform.
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- Nanophotonics (21928606), 2024, v. 13, n. 18, p. 3591, doi. 10.1515/nanoph-2024-0039
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- Article