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Plasma Chemical Deposition of Hydrogenated DLC Films with Different Hydrogen and sp<sup>3</sup>-Hybrid Carbon Content.
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- Semiconductors, 2024, v. 58, n. 1, p. 57, doi. 10.1134/S1063782624010123
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- Article
Unusual Structure, Fluxionality, and Reaction Mechanism of Carbonyl Hydrosilylation by Silyl Hydride Complex [(ArN)Mo(H)(SiH<sub>2</sub>Ph)(PMe<sub>3</sub>)<sub>3</sub>].
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- Chemistry - A European Journal, 2013, v. 19, n. 26, p. 8573, doi. 10.1002/chem.201300376
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- Article
A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials.
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- Technical Physics Letters, 2019, v. 45, n. 1, p. 48, doi. 10.1134/S1063785019010231
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- Article
On the Formation of an Anti-Reflection Layer on the Surface of Single-Crystal Silicon by Ion-Beam Etching.
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- Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques, 2023, v. 17, p. S259, doi. 10.1134/S1027451023070583
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- Article
Creation of Localized Ensembles of NV Centers in a Diamond Grown in a Microwave CVD Reactor and Study of Their Properties.
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- Radiophysics & Quantum Electronics, 2020, v. 63, n. 7, p. 530, doi. 10.1007/s11141-021-10077-9
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- Article
SIMS Analysis of Carbon-Containing Materials: Content of Carbon Atoms in sp2 and sp3 Hybridization States.
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- Technical Physics Letters, 2020, v. 46, n. 3, p. 290, doi. 10.1134/S1063785020030190
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- Article
Effect of the Chloropentafluoroethane Additive in Chlorine-Containing Plasma on the Etching Rate and Etching-Profile Characteristics of Gallium Arsenide.
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- Semiconductors, 2021, v. 55, n. 11, p. 865, doi. 10.1134/S1063782621100171
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- Article
Features of the Vapor-Phase Epitaxy of GaAs on Nonplanar Substrates.
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- Semiconductors, 2020, v. 54, n. 9, p. 1147, doi. 10.1134/S1063782620090080
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- Article
Formation of Ohmic Contacts to a Diamond-Like Carbon Layer Deposited on a Dielectric Diamond Substrate.
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- Semiconductors, 2020, v. 54, n. 9, p. 1056, doi. 10.1134/S1063782620090213
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- Article
Modification of the Ratio between sp<sup>2</sup>- to sp<sup>3</sup>-Hybridized Carbon Components in PECVD Diamond-Like Films.
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- Semiconductors, 2020, v. 54, n. 9, p. 1047, doi. 10.1134/S1063782620090316
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- Article
Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond.
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- Semiconductors, 2019, v. 53, n. 9, p. 1203, doi. 10.1134/S1063782619090136
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- Article
Plasma Chemical Etching of Gallium Arsenide in C<sub>2</sub>F<sub>5</sub>Cl-Based Inductively Coupled Plasma.
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- Semiconductors, 2018, v. 52, n. 11, p. 1473, doi. 10.1134/S1063782618110180
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- Article