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  • Impurity detection in polymer parts for the semiconductor manufacturing industry.

    Published in:
    Technisches Messen, 2018, v. 85, n. 11, p. 700, doi. 10.1515/teme-2018-0056
    By:
    • Moldaschl, T.;
    • Arnold, T.;
    • Zauner, M.;
    • Meislitzer, S.;
    • Obersteiner, D.;
    • De Biasio, M.;
    • Steinbrener, J.;
    • Neumaier, L.;
    • Molzbichler, Albert;
    • Cramer, Heinz;
    • Ottersböck, B.;
    • Oreski, G.;
    • Voronko, Y.;
    • Kraft, M.;
    • Hirschl, Christina
    Publication type:
    Article