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A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy.
- Published in:
- Sensors (14248220), 2023, v. 23, n. 3, p. 1276, doi. 10.3390/s23031276
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- Publication type:
- Article
Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement.
- Published in:
- Sensors (14248220), 2022, v. 22, n. 23, p. 9275, doi. 10.3390/s22239275
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- Publication type:
- Article
Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.
- Published in:
- Micromachines, 2023, v. 14, n. 1, p. 102, doi. 10.3390/mi14010102
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- Publication type:
- Article
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit.
- Published in:
- Micromachines, 2022, v. 13, n. 12, p. 2252, doi. 10.3390/mi13122252
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- Publication type:
- Article