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Customized 2D Structures for High Throughput Electromigration Measurements.
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- Physica Status Solidi. A: Applications & Materials Science, 2019, v. 216, n. 12, p. 1, doi. 10.1002/pssa.201800869
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- Article
A full-process chain assessment for nanoimprint technology on 200-mm industrial platform.
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- Advanced Optical Technologies, 2017, v. 6, n. 3/4, p. 277, doi. 10.1515/aot-2017-0018
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- Publication type:
- Article
UV Nanoimprint Lithography: Geometrical Impact on Filling Properties of Nanoscale Patterns.
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- Nanomaterials (2079-4991), 2021, v. 11, n. 3, p. 822, doi. 10.3390/nano11030822
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- Article