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Electron Energy Conversion to EUV Radiation in the Kα Line of Be in the "Shooting Through" Geometry.
Published in:
Journal of Experimental & Theoretical Physics, 2018, v. 127, n. 6, p. 985, doi. 10.1134/S1063776118100175
By:
- Lopatin, A. Ya.;
- Par'ev, D. E.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Chkhalo, N. I.;
- Demin, G. D.;
- Dyuzhev, N. A.;
- Makhiboroda, M. A.;
- Kochetkov, A. A.
Publication type:
Article
Analysis of cross-correlation of interface roughness in multilayer structures with ultrashort periods.
Published in:
Journal of Experimental & Theoretical Physics, 2006, v. 103, n. 3, p. 346, doi. 10.1134/S1063776106090020
By:
- Vainer, Yu. A.;
- Pestov, A. E.;
- Prokhorov, K. A.;
- Salashchenko, N. N.;
- Fraerman, A. A.;
- Chernov, V. V.;
- Chkhalo, N. I.
Publication type:
Article
Substrates for Soft X-Ray Microscopy Based on Si3N4 Membranes.
Published in:
Technical Physics, 2024, v. 69, n. 7, p. 2098, doi. 10.1134/S1063784224070375
By:
- Reunov, D. G.;
- Gusev, N. S.;
- Mikhailenko, M. S.;
- Petrova, D. V.;
- Malyshev, I. V.;
- Chkhalo, N. I.
Publication type:
Article
Project of X-Ray Optical Scheme of a Lithograph with a Transmissive Dynamic Mask and a Synchrotron Radiation Source.
Published in:
Technical Physics, 2024, v. 69, n. 7, p. 2037, doi. 10.1134/S1063784224070272
By:
- Malyshev, I. V.;
- Chkhalo, N. I.;
- Yakunin, S. N.
Publication type:
Article
Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks.
Published in:
Technical Physics, 2024, v. 69, n. 6, p. 1683, doi. 10.1134/S106378422406029X
By:
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Chernyshev, A. K.;
- Chkhalo, N. I.
Publication type:
Article
Investigation of the Properties of Multilayer Mirrors Based on a Pair of Materials Mo/B4C.
Published in:
Technical Physics, 2024, v. 69, n. 6, p. 1803, doi. 10.1134/S1063784224060434
By:
- Shaposhnikov, R. A.;
- Garakhin, S. A.;
- Durov, K. V.;
- Polkovnikov, V. N.;
- Chkhalo, N. I.
Publication type:
Article
Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm.
Published in:
Technical Physics, 2024, v. 69, n. 6, p. 1568, doi. 10.1134/S1063784224060136
By:
- Garakhin, S. A.;
- Lopatin, A. Yu.;
- Nechay, A. N.;
- Perekalov, A. A.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
The Theory of Axial Tomography Based on the Inverse Radon Transform for High-Aperture Soft X-ray Microscopy.
Published in:
Technical Physics, 2024, v. 69, n. 6, p. 1555, doi. 10.1134/S1063784224060124
By:
- Gaikovich, K. P.;
- Malyshev, I. V.;
- Reunov, D. G.;
- Chkhalo, N. I.
Publication type:
Article
Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks.
Published in:
Technical Physics, 2024, v. 69, n. 5, p. 1279, doi. 10.1134/S1063784224040248
By:
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Chernyshev, A. K.;
- Chkhalo, N. I.
Publication type:
Article
Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets.
Published in:
Technical Physics, 2024, v. 69, n. 5, p. 1259, doi. 10.1134/S1063784224040212
By:
- Lopatin, A. Ya.;
- Luchin, V. I.;
- Nachay, A. N.;
- Perekalov, A. A.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Soloviev, A. A.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Measurements of the Absolute Values of the Radiation Intensity in the Wavelength Range of 6.6–32 nm of Stainless Steel Targets with Pulsed Laser Excitation.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 870, doi. 10.1134/S1063784224030125
By:
- Garakhin, S. A.;
- Zabrodin, I. G.;
- Zuev, S. Yu.;
- Lopatin, A. Ya.;
- Nechai, A. N.;
- Pestov, A. E.;
- Perekalov, A. A.;
- Pleshkov, R. S.;
- Polkovnikov, V. N.;
- Salaschenko, N. N.;
- Smertin, R. M.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 959, doi. 10.1134/S1063784224030265
By:
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Chernyshev, A. K.;
- Zorina, M. V.;
- Chkhalo, N. I.;
- Salaschenko, N. N.
Publication type:
Article
Application of Cerium Oxide Nanopowders for Silicon Polishing.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 824, doi. 10.1134/S106378422403006X
By:
- Chkhalo, N. I.;
- Akhsakhalyan, A. A.;
- Vainer, Yu. A.;
- Zorina, M. V.;
- Pestov, A. E.;
- Svechnikov, M. V.;
- Toropov, M. N.;
- Kumar, N.;
- Tokunov, Yu. M.
Publication type:
Article
Investigation of the Emission Properties of Gas-Jet Targets in the "Water Transparency Window" of 2.3–4.4 nm under Pulsed Laser Excitation.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 876, doi. 10.1134/S1063784224030137
By:
- Guseva, V. E.;
- Nechay, A. N.;
- Perekalov, A. A.;
- Salashchenko, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Research and Creation of Broadband X-Ray Mirrors with a Spectral Transmission Band Coinciding with Emission Lines and the Possibility of Filtering.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 864, doi. 10.1134/S1063784224030113
By:
- Garakhin, S. A.;
- Dubinin, I. S.;
- Zuev, S. Yu.;
- Polkovnikov, V. N.;
- Chkhalo, N. I.
Publication type:
Article
Method for Obtaining Atomically Smooth Substrates from Single-Crystal Silicon by Mechanical Lapping.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 812, doi. 10.1134/S1063784224030046
By:
- Chkhalo, N. I.;
- Akhsakhalyan, A. A.;
- Zorina, M. V.;
- Toropov, M. N.;
- Tokunov, Yu. M.
Publication type:
Article
Prospective Wavelengths for Projection Lithography Using Synchrotron Radiation.
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 818, doi. 10.1134/S1063784224030058
By:
- Chkhalo, N. I.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Shaposhnikov, R. A.
Publication type:
Article
Search for High-Strength Multilayer Free-Standing Film Filters with High Transmittance in the Wavelength Range of the "Water Window" (2.3–4.4 nm).
Published in:
Technical Physics, 2024, v. 69, n. 4, p. 785, doi. 10.1134/S1063784224030010
By:
- Barysheva, M. M.;
- Garakhin, S. A.;
- Lopatin, A. Ya.;
- Luchin, V. I.;
- Malyshev, I. V.;
- Salashchenko, N. N.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Diamond–Carbide–Silicon Composite "Skeleton" as a Promising Material for X-Ray Optical Substrates.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 780, doi. 10.1134/S1063784224020403
By:
- Zorina, M. V.;
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Toropov, M. N.;
- Chernyshev, A. K.;
- Chkhalo, N. I.;
- Gordeev, S. K.;
- Vitkin, V. V.
Publication type:
Article
Wavefront Lens Corrector for Studying Flat Surfaces.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 730, doi. 10.1134/S1063784224020336
By:
- Toropov, M. N.;
- Akhsakhalyan, A. A.;
- Malyshev, I. V.;
- Mikhaylenko, M. S.;
- Pestov, A. E.;
- Salaschenko, N. N.;
- Chernyshov, A. K.;
- Chkhalo, N. I.
Publication type:
Article
Ru/Sr Multilayer Mirrors for the Spectral Range 9–12 nm.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 713, doi. 10.1134/S1063784224020312
By:
- Shaposhnikov, R. A.;
- Zuev, S. Yu.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 624, doi. 10.1134/S1063784224020233
By:
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Chernyshev, A. K.;
- Zorina, M. V.;
- Chkhalo, N. I.;
- Salaschenko, N. N.
Publication type:
Article
Manufacturing and Research of Mirrors with a Wide Bandwidth for Synchrotron Applications.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 468, doi. 10.1134/S1063784224020038
By:
- Akhasakhalyan, A. A.;
- Garakhin, S. A.;
- Dar'in, F. A.;
- Zorina, M. V.;
- Kriventsov, V. V.;
- Pershin, D. D.;
- Pestov, A. E.;
- Pleshkov, R. S.;
- Polkovnikov, V. N.;
- Rakshun, Ya. V.;
- Salaschenko, N. N.;
- Svetokhin, S. S.;
- Svechnikov, M. V.;
- Sorokoletov, D. S.;
- Chernov, V. A.;
- Chkhalo, N. I.
Publication type:
Article
Imaging System of a Plasma Torch of a Betatron X-Ray Source.
Published in:
Technical Physics, 2024, v. 69, n. 3, p. 480, doi. 10.1134/S1063784224020051
By:
- Antyushin, E. S.;
- Akhsakhalyan, A. A.;
- Zuev, S. Yu.;
- Lopatin, A. Ya.;
- Malyshev, I. V.;
- Nechay, A. N.;
- Perekalov, A. A.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Toropov, M. N.;
- Ulasevich, B. A.;
- Tsybin, N. N.;
- Chkhalo, N. I.;
- Soloviev, A. A.;
- Starodubtsev, M. V.
Publication type:
Article
Model of Physical Sputtering of Amorphous Materials.
Published in:
Technical Physics, 2024, v. 69, n. 2, p. 349, doi. 10.1134/S1063784224010304
By:
- Pestov, A. E.;
- Mikhailenko, M. S.;
- Chernyshev, A. K.;
- Zorina, M. V.;
- Chkhalo, N. I.
Publication type:
Article
Thin Film Al Targets for a Laser-Plasma Source of Extreme Ultraviolet Radiation.
Published in:
Technical Physics, 2024, v. 69, n. 2, p. 229, doi. 10.1134/S1063784224010134
By:
- Garakhin, S. A.;
- Lopatin, A. Ya.;
- Nechay, A. N.;
- Perekalov, A. A.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Comparative Study of the Thermal Stability of Be-Based Extreme Ultraviolet Pellicles.
Published in:
Technical Physics, 2023, v. 68, p. S630, doi. 10.1134/S106378422390098X
By:
- Zuev, S. Yu.;
- Lopatin, A. Ya.;
- Luchin, V. I.;
- Salashchenko, N. N.;
- Tatarskiy, D. A.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Material Surface Treatment for Design of Composite Optical Elements.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1828, doi. 10.1134/S1063784220110286
By:
- Zorina, M. V.;
- Kuznetsov, I. I.;
- Mikhaylenko, M. S.;
- Palashov, O. V.;
- Pestov, A. E.;
- Chkhalo, N. I.
Publication type:
Article
Application of Novel Multilayer Normal-Incidence Mirrors for EUV Solar Spectroscopy.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1736, doi. 10.1134/S1063784220110171
By:
- Kuzin, S. V.;
- Reva, A. A.;
- Bogachev, S. A.;
- Erkhova, N. F.;
- Salashchenko, N. N.;
- Chkhalo, N. I.;
- Polkovnikov, V. N.
Publication type:
Article
Obtaining of Smooth High-Precision Surfaces by the Mechanical Lapping Method.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1873, doi. 10.1134/S1063784220110262
By:
- Toropov, M. N.;
- Akhsakhalyan, A. A.;
- Zorina, M. V.;
- Salashchenko, N. N.;
- Chkhalo, N. I.;
- Tokunov, Yu. M.
Publication type:
Article
Ion-Beam Methods for High-Precision Processing of Optical Surfaces.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1837, doi. 10.1134/S1063784220110274
By:
- Zabrodin, I. G.;
- Zorina, M. V.;
- Kas'kov, I. A.;
- Malyshev, I. V.;
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Chernyshev, A. K.;
- Chkhalo, N. I.
Publication type:
Article
Optimization of an Anode Membrane with a Transmission-Type Target in a System of Soft X-Ray Sources for X-Ray Nanolithography.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1709, doi. 10.1134/S1063784220110122
By:
- Glagolev, P. Yu.;
- Demin, G. D.;
- Oreshkin, G. I.;
- Chkhalo, N. I.;
- Djuzhev, N. A.
Publication type:
Article
Multilayer Cr/Sc Mirrors with Improved Reflection for the "Water Transparency Window" Range.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1809, doi. 10.1134/S1063784220110225
By:
- Polkovnikov, V. N.;
- Garakhin, S. A.;
- Kvashennikov, D. S.;
- Malyshev, I. V.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Smertin, R. M.;
- Chkhalo, N. I.
Publication type:
Article
The Microstructure of Transition Boundaries in Multilayer Mo/Be Systems.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1800, doi. 10.1134/S1063784220110250
By:
- Smertin, R. M.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Chkhalo, N. I.;
- Yunin, P. A.;
- Trigub, A. L.
Publication type:
Article
Broadband Mirrors for Spectroheliographs at the KORTES Sun Study Facility.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1792, doi. 10.1134/S1063784220110109
By:
- Garakhin, S. A.;
- Barysheva, M. M.;
- Vishnyakov, E. A.;
- Zuev, S. Yu.;
- Kirichenko, A. S.;
- Kuzin, S. V.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Chkhalo, N. I.
Publication type:
Article
The Smoothing Effect of Si Layers in Multilayer Be/Al Mirrors for the 17- to 31-nm Range.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1786, doi. 10.1134/S1063784220110201
By:
- Pleshkov, R. S.;
- Zuev, S. Yu.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Chkhalo, N. I.;
- Jonnard, P.
Publication type:
Article
Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1780, doi. 10.1134/S1063784220110110
By:
- Garakhin, S. A.;
- Zorina, M. V.;
- Zuev, S. Yu.;
- Mikhailenko, M. S.;
- Pestov, A. E.;
- Pleshkov, R. S.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Prospects for the Use of X-Ray Tubes with a Field-Emission Cathode and a Through-Type Anode in the Range of Soft X-Ray Radiation.
Published in:
Technical Physics, 2020, v. 65, n. 11, p. 1726, doi. 10.1134/S1063784220110043
By:
- Barysheva, M. M.;
- Zuev, S. Yu.;
- Lopatin, A. Ya.;
- Luchin, V. I.;
- Pestov, A. E.;
- Salashchenko, N. N.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Measurement Error of Interferometers with Diffraction Reference Wave.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1698, doi. 10.1134/S1063784219110021
By:
- Akhsakhalyan, A. A.;
- Gavrilin, D. A.;
- Malyshev, I. V.;
- Salashchenko, N. N.;
- Toropov, M. N.;
- Ulasevich, B. A.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes.
Published in:
Technical Physics, 2019, v. 64, n. 12, p. 1742, doi. 10.1134/S1063784219120053
By:
- Djuzhev, N. A.;
- Demin, G. D.;
- Filippov, N. A.;
- Evsikov, I. D.;
- Glagolev, P. Yu.;
- Makhiboroda, M. A.;
- Chkhalo, N. I.;
- Salashchenko, N. N.;
- Filippov, S. V.;
- Kolosko, A. G.;
- Popov, E. O.;
- Bespalov, V. A.
Publication type:
Article
Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1673, doi. 10.1134/S1063784219110045
By:
- Barysheva, M. M.;
- Garakhin, S. A.;
- Zuev, S. Yu.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Smertin, R. M.;
- Chkhalo, N. I.;
- Meltchakov, E.
Publication type:
Article
Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1684, doi. 10.1134/S1063784219110161
By:
- Kvashennikov, D. S.;
- Zuev, S. Yu.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Chkhalo, N. I.;
- Delmotte, F.;
- Meltchakov, E.
Publication type:
Article
Influence of Thermal Annealing on the Properties of Multilayer Mo/Be Mirrors.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1692, doi. 10.1134/S1063784219110252
By:
- Smertin, R. M.;
- Garakhin, S. A.;
- Zuev, S. Yu.;
- Nechai, A. N.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Sertsu, M. G.;
- Sokolov, A.;
- Chkhalo, N. I.;
- Schäfers, F.;
- Yunin, P. A.
Publication type:
Article
Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1688, doi. 10.1134/S1063784219110318
By:
- Zuev, S. Yu.;
- Pleshkov, R. S.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Svechnikov, M. V.;
- Chkhalo, N. I.;
- Schäfers, F.;
- Sertsu, M. G.;
- Sokolov, A.
Publication type:
Article
Fabrication and Study of a Concave Crystal Mirror for the KORTES Project.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1680, doi. 10.1134/S1063784219110033
By:
- Akhsakhalyan, A. A.;
- Akhsakhalyan, A. D.;
- Garakhin, S. A.;
- Erkhova, N. F.;
- Kirichenko, A. S.;
- Kuzin, S. V.;
- Salashchenko, N. N.;
- Toropov, M. N.;
- Chkhalo, N. I.
Publication type:
Article
Beryllium as a Material for Thermally Stable X-Ray Mirrors.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1596, doi. 10.1134/S1063784219110070
By:
- Chkhalo, N. I.;
- Zorina, M. V.;
- Malyshev, I. V.;
- Pestov, A. E.;
- Polkovnikov, V. N.;
- Salashchenko, N. N.;
- Kazakov, D. S.;
- Mil'kov, A. V.;
- Strulya, I. L.
Publication type:
Article
Optical, Mechanical, and Thermal Properties of Free-Standing MoSi2Nx and ZrSi2Ny Nanocomposite Films.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1590, doi. 10.1134/S1063784219110306
By:
- Zuev, S. Yu.;
- Lopatin, A. Ya.;
- Luchin, V. I.;
- Salashchenko, N. N.;
- Tatarskiy, D. A.;
- Tsybin, N. N.;
- Chkhalo, N. I.
Publication type:
Article
Emission Properties of Laser Plasma Excited on Molecular-Cluster Carbon Dioxide Jets.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1566, doi. 10.1134/S1063784219110203
By:
- Nechai, A. N.;
- Perekalov, A. A.;
- Chkhalo, N. I.;
- Salashchenko, N. N.
Publication type:
Article
Simulation of Local Error Correction of the Surface Shape by a Low-Dimensional Ion Beam.
Published in:
Technical Physics, 2019, v. 64, n. 11, p. 1560, doi. 10.1134/S1063784219110069
By:
- Chernyshev, A. K.;
- Malyshev, I. V.;
- Pestov, A. E.;
- Chkhalo, N. I.
Publication type:
Article
Absolutely Calibrated Spectrally Resolved Measurements of Xe Laser Plasma Radiation Intensity in the EUV Range.
Published in:
Technical Physics, 2018, v. 63, n. 10, p. 1507, doi. 10.1134/S1063784218100080
By:
- Butorin, P. S.;
- Zadiranov, Yu. M.;
- Zuev, S. Yu.;
- Kalmykov, S. G.;
- Polkovnikov, V. N.;
- Sasin, M. E.;
- Chkhalo, N. I.
Publication type:
Article

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