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Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes.
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- Optical Engineering, 2011, v. 50, n. 9, p. 093604, doi. 10.1117/1.3622485
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Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes.
- Published in:
- Optical Engineering, 2010, v. 49, n. 5, p. 053606, doi. 10.1117/1.3431659
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- Article