Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleRadio frequency GDOES depth profiling analysis of a B-doped diamond film deposited onto Si by microwave plasma CVD.AuthorsShimizu, K.; Einaga, Y.; Ohnishi, K.; Fujishima, A.; Habazaki, H.; Skeldon, P.; Thompson, G. E.PublicationSurface & Interface Analysis: SIA, 2002, Vol 33, Issue 1, p35ISSN0142-2421Publication typeArticleDOI10.1002/sia.1158