Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleSynthesis of Metal Oxide Thin Films by Reactive Magnetron Sputtering in Ar/O<sub>2</sub> Mixtures: An Experimental Study of the Chemical Mechanisms.AuthorsSnyders, Rony; Dauchot, Jean-Pierre; Hecq, MichelPublicationPlasma Processes & Polymers, 2007, Vol 4, Issue 2, p113ISSN1612-8850Publication typeArticleDOI10.1002/ppap.200600103