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- Title
Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques.
- Authors
Kleider, Jean-Paul; Johnson, Erik; Brüggemann, Rudolf; Müller, Martin; Galář, Pavel; Stuchlík, Jiří; Kočka, Jan; Kupka, Jonáš; Kůsová, Kateřina
- Abstract
We have synthesised silicon nanoparticles (Si-NPs) with photoluminescence ranging from blue to IR spectral region using a low-pressure RF plasma in a flow-through glass tube reactor. The spectral position of photoluminescence band of Si-NPs is controlled by the synthesis parameters such as plasma power, silane and hydrogen concentration and pressure in the working area. Modification of Si-NPs surface both on air after the synthesis and in the vacuum chamber by second plasma in methylsilane atmosphere causes a blue spectral shift of the photoluminescence band.
- Subjects
THERMAL plasmas; NON-thermal plasmas; NANOPARTICLES; VACUUM chambers; SILICON; PHOTOLUMINESCENCE
- Publication
European Physical Journal - Applied Physics, 2020, Vol 89, Issue 2, p1
- ISSN
1286-0042
- Publication type
Article
- DOI
10.1051/epjap/2020190263