Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleA Lightweight Neural Network for Spectroscopic Ellipsometry Analysis.AuthorsZhu, Pengfei; Zhang, Di; Niu, Xin; Liu, Jinchao; Ren, Mengxin; Xu, JingjunPublicationAdvanced Optical Materials, 2024, Vol 12, Issue 4, p1ISSN2195-1071Publication typeArticleDOI10.1002/adom.202301381