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- Title
Absolutely Calibrated Spectrally Resolved Measurements of Xe Laser Plasma Radiation Intensity in the EUV Range.
- Authors
Butorin, P. S.; Zadiranov, Yu. M.; Zuev, S. Yu.; Kalmykov, S. G.; Polkovnikov, V. N.; Sasin, M. E.; Chkhalo, N. I.
- Abstract
Abstract: With the aid of Mo/Be and Si/Mo interference mirrors, measurements of radiation intensity from laser plasma with Xe gas-jet target have been realized within a wavelength interval of 11-14 nm with a spectral resolution of 3-6 Å. The results are compared with the spectrum formerly measured with the aid of a spectrograph. The ratio of intensities at wavelengths of 11.2 and 13.5 nm has been found to be about 10 under experimental conditions studied.
- Subjects
EXTREME ultraviolet lithography; ULTRAVIOLET radiation measurement; PLASMA radiation; LASER plasmas; XENON spectra; MOLYBDENUM; BERYLLIUM; SILICON
- Publication
Technical Physics, 2018, Vol 63, Issue 10, p1507
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784218100080