We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
Effect of electron irradiation on carrier removal rate in silicon and silicon carbide with 4 H modification.
- Authors
Kozlovskiĭ, V.; Emtsev, V.; Emtsev, K.; Strokan, N.; Ivanov, A.; Lomasov, V.; Oganesyan, G.; Lebedev, A.
- Abstract
Comparative study of the effect of successive (up to fluences of 3 × 1016 cm−2) irradiation with 900 keV electrons of samples made of FZ-Si and 4 H-SiC (CVD) has been performed for the first time. Measurements on initial and irradiated samples were made using the van der Pauw method for silicon and the capacitance-voltage technique at a frequency of 1 kHz for silicon carbide. In addition, the spectrum of the defect levels introduced was monitored by the DLTS method for SiC. The carrier removal and defect introduction rates were determined for the two materials. It was found that the rates of defect introduction into FZ-Si and 4 H-SiC (CVD) are close to eachy other (∼0.1 cm−1), which is largely due to the almost identical threshold energies of defect generation.
- Subjects
SILICON carbide; SILICON; ELECTRONS; IRRADIATION; RADIATION
- Publication
Semiconductors, 2008, Vol 42, Issue 2, p242
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1007/s11453-008-2023-8