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- Title
Industrial perspective on focused electron beam-induced processes.
- Authors
Bret, Tristan; Hofmann, Thorsten; Edinger, Klaus
- Abstract
After a short overview of the historical developments of the technique of gas-assisted focused electron beam-induced processing (mostly deposition and etching), this paper deals with the applications of this technology to photolithographic mask repair. A commented list of results is shown on different mask types, for different types of defects, and at different node generations. The scope of this article is double: summarize the state of the art in a fast-paced highly specific industrial environment driven by 'Moore's law' and feedback to academic researchers some technologically relevant directions for further investigations.
- Subjects
ELECTRON beams; MOORE'S law; PHOTOLITHOGRAPHY; SURFACE defects; REPAIR &; maintenance services
- Publication
Applied Physics A: Materials Science & Processing, 2014, Vol 117, Issue 4, p1607
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-014-8601-2