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- Title
Synthesis of Calcium(II) Amidinate Precursors for Atomic Layer Deposition through a Redox Reaction between Calcium and Amidines.
- Authors
Kim, Sang Bok; Yang, Chuanxi; Powers, Tamara; Davis, Luke M.; Lou, Xiabing; Gordon, Roy G.
- Abstract
We have prepared two new CaII amidinates, which comprise a new class of ALD precursors. The syntheses proceed by a direct reaction between Ca metal and the amidine ligands in the presence of ammonia. Bis(N,N′-diisopropylformamidinato)calcium(II) ( 1) and bis(N,N′-diisopropylacetamidinato)calcium(II) ( 2) adopt dimeric structures in solution and in the solid state. X-ray crystallography revealed asymmetry in one of the bridging ligands to afford the structure [(η2-L)Ca(μ-η2:η2-L)(μ-η2:η1-L)Ca(η2-L)]. These amidinate complexes showed unprecedentedly high volatility as compared to the widely employed and commercially available CaII precursor, [Ca3(tmhd)6]. In CaS ALD with 1 and H2S, the ALD window was approximately two times wider and lower in temperature by about 150 °C than previously reported with [Ca3(tmhd)6] and H2S. Complexes 1 and 2, with their excellent volatility and thermal stability (up to at least 350 °C), are the first homoleptic CaII amidinates suitable for use as ALD precursors.
- Subjects
ATOMIC layer deposition; CHEMICAL synthesis; CHEMICAL reactions; LIGANDS (Chemistry); BRIDGING ligands
- Publication
Angewandte Chemie, 2016, Vol 128, Issue 35, p10384
- ISSN
0044-8249
- Publication type
Article
- DOI
10.1002/ange.201602406