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- Title
Resolving Mechanical Properties and Morphology Evolution of Free‐Standing Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>.
- Authors
Tharpe, Troy; Zheng, Xu-Qian; Feng, Philip X.-L.; Tabrizian, Roozbeh
- Abstract
The cover illustrates a free‐standing, ferroelectric, hafnia‐zirconia nano‐resonator, realized from 50nm Hf0.5Zr0.5O2 – Al2O3 nanolaminates. Optical excitation and detection of in‐plane and out‐of‐plane resonance modes enables accurate determination of Young’s modulus and residual stress. Further, X‐ray diffraction measurements reveal the free‐standing film to be predominantly orthorhombic with a robust ferroelectricity. Additional details can be found in article number 2101221 by Troy Tharpe, Xu‐Qian Zheng, Philip X.‐L. Feng, and Roozbeh Tabrizian.
- Publication
Advanced Engineering Materials, 2021, Vol 23, Issue 12, p1
- ISSN
1438-1656
- Publication type
Article
- DOI
10.1002/adem.202101221