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- Title
Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars.
- Authors
Wenjing Dong; Kenan Zhang; Yun Zhang; Tiaoxing Wei; Yan Sun; Xin Chen; Ning Dai
- Abstract
We describe a strategy for selectively coating the vertical surfaces of standing nanopillars using area-selective atomic layer deposition (ALD). Hydrophobic self-assembled monolayers (SAMs) are utilised to selectively inhibit the coating of oxides on the modified horizontal regions to ensure that only the vertical surfaces of vertical standing nanorods are coated using ALD processes. This method makes it possible to fabricate vertical nanodevices using a simple process of depositing oxide layer on a vertical surface, and can also be applied to the area-selective surface passivation of other standing structures.
- Subjects
MONOMOLECULAR films; OXIDE synthesis; NANOROD synthesis; ATOMIC layer deposition; OXIDES
- Publication
Scientific Reports, 2014, p1
- ISSN
2045-2322
- Publication type
Article
- DOI
10.1038/srep04458