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- Title
Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range.
- Authors
Klyui, N.; Liptuga, A.; Lozinskii, V.; Lukyanov, A.; Oksanich, A.; Terban, V.
- Abstract
The effect of treatments in plasmas of different gases and subsequent deposition of diamond-like carbon films (DCFs) on the transmission of semi-insulating GaAs crystals in the IR spectral range has been analyzed. It is shown that deposition of 1- to 1.5-μm DCFs makes it possible to increase the GaAs transmission in the range of 4-15 μm and that preliminary treatment in H or Ar plasma increases the optical transmission of the DCF-GaAs structure. A mechanism is proposed to explain the effect of plasma treatment on the optical transmission of semi-insulating GaAs in the IR spectral range.
- Subjects
DIAMOND films; GALLIUM arsenide; CARBON films; INFRARED spectra; NITROGEN; HYDROGEN; ARGON plasmas; METAL crystals
- Publication
Technical Physics Letters, 2012, Vol 38, Issue 7, p609
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S106378501207005X