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- Title
A simple way to obtain backscattered electron images in a scanning transmission electron microscope.
- Authors
Tsuruta, Hiroki; Tanaka, Shigeyasu; Tanji, Takayoshi; Morita, Chiaki
- Abstract
We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm2 Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM.
- Subjects
ELECTRON backscattering; BACKSCATTERING; ELECTRON detection; ELECTRON counters; SCANNING transmission electron microscopy
- Publication
Microscopy, 2014, Vol 63, Issue 4, p333
- ISSN
2050-5698
- Publication type
Article
- DOI
10.1093/jmicro/dfu017