Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleMicro/Nano Manufacturing.AuthorsTosello, GuidoSubjectsMANUFACTURING processes; MICROFABRICATIONPublicationMicromachines, 2017, Vol 8, Issue 10, p297ISSN2072-666XPublication typeArticleDOI10.3390/mi8100297