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- Title
MORPHOLOGY-DEPENDENT OPTICAL TRANSMISSION OF RF-SPUTTERED ZnO:Al FILM ON GLASS SUBSTRATE.
- Authors
KHEANWONG, J.; RATTANASAKULTHONG, W.
- Abstract
Aluminum doped zinc oxide (ZnO:Al) films with different thickness (360, 410, 850, 1290 and 3230 nm) on glass substrate deposited by RF magnetron sputtering were etched in HCl solutions. All films showed a (HCP) wurtzite phase with (002) preferred orientation.The crystallinity of as-deposited films was increasedwith increasing the film thickness. AFM revealed thatgrain size, shape and distribution are strongly depended on the film thickness. The optical transmission of all films was strongly depended on the surface morphology and film thickness. The transmission spectra of film thickness lower than 500 nm showed a smooth pattern over wide wavelength range and its transmission increased with increasing the film thickness whereas film thickness higher than 500 nm exhibited a fluctuate pattern and wavelength at the maximum transmission strongly depended on surface morphology. Etching process give rises to a higher surface roughness and wide wavelength range of transmission.The 3230 nm-film showed the maximum transmission of 86% in wavelength between 550-650 nm and the etched 360 and 410 nm-films showed an average transmission of about 86% in visible region.
- Subjects
ZINC oxide; WURTZITE; SULFIDE minerals; THIN films; ELECTRON glasses
- Publication
Digest Journal of Nanomaterials & Biostructures (DJNB), 2015, Vol 10, Issue 3, p759
- ISSN
1842-3582
- Publication type
Article