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- Title
Preparation of nitrogen-doped YSZ thin films by pulsed laser deposition and their characterization.
- Authors
Valov, I.; De Souza, R. A.; Wang, C. Z.; Börger, A.; Korte, C.; Martin, M.; Becker, K.-D.; Janek, J.
- Abstract
The pulsed laser deposition technique was applied to deposit nitrogen-doped yttria stabilized zirconia (YSZ) thin films. The working parameters were varied in order to achieve a maximal nitrogen content. The films were characterized by SIMS, XPS, X-ray diffraction and optical spectroscopy. The surface topography was studied by AFM and HRSEM. The influence of the deposition parameters on the film properties is discussed.
- Subjects
PULSED laser deposition; ZIRCONIUM oxide; THIN films; NITROGEN; OPTICAL diffraction; SPECTRUM analysis; SURFACE coatings
- Publication
Journal of Materials Science, 2007, Vol 42, Issue 6, p1931
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-006-0174-9