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- Title
Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays.
- Authors
Merthe, Daniel J.; Yashchuk, Valeriy V.; Goldberg, Kenneth A.; Kunz, Martin; Nobumichi Tamura; McKinney, Wayne R.; Artemiev, Nikolay A.; Celestre, Richard S.; Morrison, Gregory Y.; Anderson, Erik H.
- Abstract
We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the Advanced Light Source Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200 nm (horizontal) x 100 nm (vertical). After applying this methodology, we measured a beam waist size of 290 nm (horizontal) x 130 nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.
- Subjects
SOFT X rays; MIRRORS; X-ray optics; OPTICAL diffraction; DIFFRACTION gratings; INTERFEROMETERS
- Publication
Optical Engineering, 2013, Vol 52, Issue 3, p1
- ISSN
0091-3286
- Publication type
Article
- DOI
10.1117/1.OE.52.3.033603