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- Title
Insights into Texture and Phase Coexistence in Polycrystalline and Polyphasic Ferroelectric HfO<sub>2</sub> Thin Films using 4D-STEM.
- Authors
Grimley, Everett D.; Frisone, Sam; Schenk, Tony; Park, Min Hyuk; Fancher, Chris M.; Mikolajick, Thomas; Jones, Jacob L.; Schroeder, Uwe; LeBeau, James M.
- Abstract
The article discusses the use of an electron microscope pixel array detector (EMPAD) to gain insights into the texture and phase distribution in ferroelectric HfO2 thin films, revealing the orientation of TiN electrodes and providing understanding of film texture influence on film properties.
- Subjects
ATOMIC layer deposition; MATERIALS science; RAPID thermal processing; SCHOLARSHIPS
- Publication
Microscopy & Microanalysis, 2019, p184
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1017/S1431927618001411