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- Title
Development of a target for laser-produced plasma EUV light source using Sn nano-particles.
- Authors
Tanaka, H.; Akinaga, K.; Takahashi, A.; Okada, T.
- Abstract
Nano-structured and tin-based targets have been fabricated by the pulsed-laser ablation method, in order to develop efficient and debris-free targets for the laser-produced plasma extreme ultraviolet (EUV) light source at 13.5 nm. Characteristic spectra that have the radiation peak around 13.5 nm were obtained from CO2 laser produced plasma using the films as a target. A nano-structured target produced EUV light as intense as a bulk target and a narrower line spectrum at 13.5 nm than a bulk target.
- Subjects
INDUSTRIAL lasers; MANUFACTURING processes; LIGHT sources; LASERS; OPTOELECTRONIC devices
- Publication
Applied Physics A: Materials Science & Processing, 2004, Vol 79, Issue 4-6, p1493
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-004-2828-2