Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.TitleP‐1: A Study on the Mechanism of Fluorination Enhanced Thermal Stability of IGZO Thin‐Film Transistors Based on a Kinetic Model of Donor‐Defects.AuthorsWang, Yuqi; Jiang, Wei; Xia, Zhihe; Wong, ManPublicationSID Symposium Digest of Technical Papers, 2023, Vol 54, Issue 1, p1778ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.16949