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- Title
Using ion beams for creation of nanostructures on the surface of high-stable materials.
- Authors
Gorbov, I. V.; Petrov, V. V.; Kryuchyn, A. A.
- Abstract
Main ion-beam etching techniques for creation of nanostructures on the surface of high-stable materials have been considered. Methods of information recording in the form of nanostructure on the metallic substrate surface have been analyzed. Application of glass substrate for creation long-term data carrier was proposed. Microrelief information record on the glass substrate surface was obtained using the ionbeam etching.
- Subjects
ION bombardment; NANOSTRUCTURED materials; SEMICONDUCTOR etching; CHROMOGENIC compounds; ANISOTROPY; PHYSICAL sciences research
- Publication
Semiconductor Physics, Quantum Electronics & Optoelectronics, 2007, Vol 10, Issue 1, p27
- ISSN
1560-8034
- Publication type
Article
- DOI
10.15407/spqeo10.01.027