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- Title
Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures.
- Authors
Tang, Yong‐Chao; Zhang, Hui; Kwon, Sangil; Mohebbi, Hamid R.; Cory, David G.; Peng, Li‐Cong; Gu, Lin; Guo, Hai‐Zhong; Jin, Kui‐Juan; Miao, Guo‐Xing
- Abstract
We fabricated a type of superconducting heterostructures, TiN/tapering/NbN/tapering/TiN, on c-cut sapphire substrates by reactive magnetron sputtering. The goal is to achieve an x-band resonator that maintains a high Q in modest magnetic fields. The structure shows (111) orientation with local epitaxial correlation, as a result of stacking face-centered-cubic structures on top of hexagonal-close-packing substrates. The artificial tapering layers vary gradually from NbN into TiN and vice versa, creating a smooth transition so that no distinct interface exists. We characterized microstrip single line resonators on these heterostructures that are promising candidates for quantum information processing with hybrid nuclear-electron spins.
- Subjects
RESONATORS; MAGNETRONS; HETEROSTRUCTURES
- Publication
Advanced Engineering Materials, 2016, Vol 18, Issue 10, p1816
- ISSN
1438-1656
- Publication type
Article
- DOI
10.1002/adem.201600226