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- Title
Growth and properties of HfZnO thin films on flexible PET substrate using pulsed laser deposition.
- Authors
Zhou, Xiongtu; Zhang, Yong-ai; Shi, Wangzhou; Guo, Tailiang
- Abstract
Hf-doped ZnO thin films with different Hf contents of target (HfZnO 0 ≤ x ≤ 10 at.%) were deposited on flexible PET substrates under different oxygen pressure using pulsed laser deposition. Microstructures, optical and electrical properties of the films were studied. The results show that the as-deposited HfZnO (0 ≤ x ≤ 5 at.%) films crystallized in ZnO hexagonal wurtzite structure with a highly preferred c-axis orientation. The films exhibited a transmission of higher than 80 % in the visible region. With increasing Hf content, the lattice constants increased; the morphology of the films deteriorated. The sheet resistance reached a minimum value of 16 Ω/□ when the doping level was about 0.5 at.%.
- Subjects
HAFNIUM oxide; POLYETHYLENE terephthalate; PULSED laser deposition; MICROSTRUCTURE; WURTZITE
- Publication
Journal of Materials Science: Materials in Electronics, 2013, Vol 24, Issue 1, p362
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-012-0757-y