Back to matchesWe found a matchYour institution may have rights to this item. Sign in to continue.Title3D Nanofluidic Channels Shaped by Electron-Beam-Induced Etching.AuthorsPerry, John M.; Harms, Zachary D.; Jacobson, Stephen C.PublicationSmall, 2012, Vol 8, Issue 10, p1521ISSN1613-6810Publication typeArticleDOI10.1002/smll.201102240