We found a match
Your institution may have rights to this item. Sign in to continue.
- Title
A flexible aluminum thin film electrode with enhanced electrical property and stability via a facial method.
- Authors
Wang, Tao; Cao, Lili; Miao, Min
- Abstract
The demand for flexible electronics in electronic devices has increased significantly due to the advantages of flexible electronics in lightweight mechanical flexibility and durability. In this work, a pure aluminum (Al) electrode thin film (158–179 nm) with outstanding electrical properties, which can naturally generate a protective layer is presented, was successfully prepared on flexible substrates (polyimide, PI) using a vacuum evaporation method. The best electrical property of Al thin film (3.32 × 10–8 Ω m) is close to the resistivity of bulk Al materials due to the dense and continuous structure. In addition, aluminum oxide (Al2O3) thin film generated naturally on the surface of Al thin film plays a protective role, making the electrical performance of Al thin film electrode more stable at high temperature. Hence, the resistivity of Al films performs good stability with an increase by 0.03% after annealing at 100 °C in the air. After being placed for half a year, the resistivity of the film on PI substrate only increased by 0.027%. The electrode film was flexible enough to withstand 5 × 103 bending cycles with a 6-mm bending diameter. This surface oxidation multi-layer film with enhanced electrical performance and stability provides an experiment basis for the application and industrialization of Al thin film electrodes in the future.
- Subjects
THIN films; ALUMINUM films; FLEXIBLE electronics; ELECTRODES; ALUMINUM oxide
- Publication
Journal of Materials Science: Materials in Electronics, 2021, Vol 32, Issue 24, p28772
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-021-07262-x